About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
2026 Technical Division Student Poster Contest
|
| Presentation Title |
SPG-38: Fabrication and Characterization of Mo-Ti Alloy Magnetron Sputtering Targets Using Spark Plasma Sintering Process |
| Author(s) |
Byungheon Oh, Geon Kim, Jio Yoon, Dongju Lee |
| On-Site Speaker (Planned) |
Byungheon Oh |
| Abstract Scope |
Molybdenum (Mo) is widely used in electronic components, including electrodes and diffusion barrier layers for display applications, owing to its excellent corrosion resistance, high thermal and electrical conductivity, and low electrical impedance. Alloying Mo with titanium (Ti) has been shown to further enhance thermal stability and corrosion resistance, thereby improving barrier performance. Conventional Mo alloy sputtering targets fabricated by casting often suffer from microstructural inhomogeneity and segregation, necessitating additional post-processing. In this study, Mo–Ti alloy compacts for magnetron sputtering targets were fabricated from Mo and Ti nanopowders through in-situ alloying during the SPS process. The effects of sintering parameters on densification behavior, interdiffusion, and microstructural evolution were systematically investigated. Subsequently, Mo–Ti thin films were deposited using the SPS-sintered targets, and their structural and functional properties were analyzed. Subsequently, Mo–Ti thin films were deposited using the SPS-sintered targets, and their structural and functional properties were analyzed. |
| Proceedings Inclusion? |
Undecided |
| Keywords |
Powder Materials, High-Temperature Materials, Thin Films and Interfaces |