About this Abstract |
| Meeting |
2027 TMS Annual Meeting & Exhibition
|
| Symposium
|
2D Materials – Preparation, Properties, Modeling & Applications
|
| Presentation Title |
Metal Organic Chemical Vapor Depostion of 2-dimensional Transition Metal Dichalcogenides |
| Author(s) |
Michael Curtis, Dave Estrada |
| On-Site Speaker (Planned) |
Michael Curtis |
| Abstract Scope |
Two‑dimensional transition metal dichalcogenides (TMDs) offer strong potential for next‑generation nanoelectronics and optoelectronics due to their atomic thickness, direct bandgaps, and compatibility with heterogeneous integration, yet scalable manufacturing remains a barrier to practical deployment. Achieving wafer‑scale uniformity, crystalline quality, and deterministic control of electronic properties is difficult within legacy semiconductor processes. This work demonstrates that high‑quality monolayer TMDs can be synthesized in an industry‑relevant multi‑wafer MOCVD system through a novel epitaxial mechanism that leverages a hydride precursor and tightly controlled reactor conditions. By enabling the sapphire substrate and TMD overlayer to co‑evolve toward an energetically favorable configuration, the process yields uniform, crystalline monolayers at scale. Extending this approach to ternary alloys allows systematic tuning of optical bandgap and threshold voltage—from negative to positive—demonstrating direct coupling between composition and device behavior. These results provide a scalable, industrially compatible route for monolayer synthesis and device‑level engineering without boutique substrates or ex‑situ processing. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Nanotechnology, Thin Films and Interfaces |