About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
Recent Advances in Electron Back-Scattered Diffraction and Related Techniques
|
| Presentation Title |
Near-Axis TKD for Improving Spatial Resolution |
| Author(s) |
Michael Hjelmstad, Kim Larsen, Mark Coleman, Angus Bewick |
| On-Site Speaker (Planned) |
Michael Hjelmstad |
| Abstract Scope |
Transmission Kikuchi Diffraction (TKD) was a breakthrough technique that improved the spatial resolution of microstructural mapping (EBSD in SEM) to roughly 10nm. Originally, an off-axis geometry that used traditional EBSD hardware was employed. Although it was an easier approach, it required high beam currents to achieve good signal. An on-axis technique was later developed that produced less distortion in patterns with good signal but required a means of removing the transmitted electron beam from the Kikuchi patterns. To take the positive of both setups, we have developed “Near-Axis TKD (NA-TKD).” The NA-TKD setup can be used at short working distance with zero sample tilt and a lower beam current, all variables that will improve spatial resolution. The detector can be tilted to optimize sample-to-screen distance and incorporates brightfield and darkfield STEM imaging. The talk will explore optimization of setup parameters to achieve sub-10nm spatial resolution. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, Other, |