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Meeting 2027 TMS Annual Meeting & Exhibition
Symposium Advances in Surface Engineering IX
Presentation Title Characterization of microstructural and interface properties of Fe/Si multilayers deposited under various sputtering deposition methods
Author(s) Ariel Capote Sanchez, Theophil J. Oros, Akhil Sheoran, Christopher Haddock, Andrea M. Hodge
On-Site Speaker (Planned) Ariel Capote Sanchez
Abstract Scope The development of multilayer coatings for optical applications is strongly dependent on interface sharpness, microstructural coherence, and precise control of layer thickness and periodicity. Multilayer films comprising of Fe and Si layers are promising candidates for polarizing neutron supermirror coatings due to their high scattering length density contrast and compatibility with large-area deposition techniques. In this work, [Fe(7nm)/Si(6.5nm)]5 multilayers were deposited using DC, RF, and reactive DC magnetron sputtering under comparable growth conditions. The influence of plasma-assisted growth dynamics on multilayer formation was investigated using X-ray reflectivity (XRR), X-ray diffraction (XRD), profilometry, residual stress measurements, and STEM–EDS characterization. While all deposition methods produced relatively smooth multilayer microstructures, differences were observed in interface sharpness, compositional modulation, and reflectivity characteristics. Ultimately, the results suggest that neutron supermirror coatings quality is governed not only by nominal layer thickness but also by growth dynamics, with each deposition method showing distinct trade-offs.
Proceedings Inclusion? Planned:
Keywords Thin Films and Interfaces, Other, Other

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