About this Abstract |
| Meeting |
2027 TMS Annual Meeting & Exhibition
|
| Symposium
|
Nanocomposite Materials: Innovations in Design, Fabrication, and Applications
|
| Presentation Title |
Vapor-Phase Synthesis of Organic-Inorganic Hybrid Composite Thin Films for Next-Generation EUV Lithography |
| Author(s) |
Chang-Yong Nam |
| On-Site Speaker (Planned) |
Chang-Yong Nam |
| Abstract Scope |
The continued advancement of semiconductor manufacturing into the angstrom-scale regime relies on further improvements in extreme ultraviolet (EUV) lithography, where photoresist performance remains a major materials challenge. In this presentation, I will highlight recent developments in organic-inorganic hybrid composite thin films prepared using vapor-phase methods, including vapor-phase infiltration (VPI) and molecular atomic layer deposition (MALD), for EUV resist applications. I will also discuss how these synthesis approaches enable tunable material properties relevant to lithographic performance, as well as provide an outlook on opportunities and remaining challenges for vapor-derived hybrid photoresists in future semiconductor patterning technologies. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Composites, Electronic Materials, |