About this Abstract |
| Meeting |
2026 TMS Annual Meeting & Exhibition
|
| Symposium
|
Recent Advances in Electron Back-Scattered Diffraction and Related Techniques
|
| Presentation Title |
Experimental and Simulation Insights Into Unintended Electron Beam-Induced Heating in SEM Experiments |
| Author(s) |
Alice Bastos S. Fanta, Christina Koenig, Joerg Jinschek |
| On-Site Speaker (Planned) |
Alice Bastos S. Fanta |
| Abstract Scope |
Given the widespread application of electron backscatter diffraction (EBSD) in materials research, electron beam-induced heating is often overlooked when interpreting structural phenomena under investigation. This study investigates and quantifies electron beam-induced sample heating effects in SEM experiments. Using a MEMS-based heater to monitor the real-time sample temperature in-situ, Fe-samples were analyzed to quantify the localized thermal effect under different acquisition parameters. Our results indicate that the beam current is the main factor driving localized sample heating, with a temperature increase of up to 70 °C (in our Fe sample) at high beam currents. Moreover, this highlights the importance of integrating active temperature feedback mechanisms into in-situ SEM heating setups to ensure the reliability of the experiments by minimizing unintended thermal effects. Optimizing SEM parameters, can reduce beam-induced heating and improve the interpretability of such microstructural analyses. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, Iron and Steel, |