About this Abstract |
| Meeting |
2027 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advances in Surface Engineering IX
|
| Presentation Title |
Conformal Atomic Layer Deposition of Nanocrystalline Oxide Hard Coatings on Complex Tool Geometries |
| Author(s) |
Dae Haa Ryu, Juhyeong Lee, Taekjib Choi, Ki Buem Kim |
| On-Site Speaker (Planned) |
Taekjib Choi |
| Abstract Scope |
Advanced cutting tools require prolonged operational lifetimes to maintain precision and productivity in modern manufacturing processes. However, conventional metal nitride coatings can suffer from thermochemical degradation under severe machining environments, which limits their long-term reliability. In this study, nanocrystalline oxide hard coatings were conformally deposited on nitride-coated substrates using atomic layer deposition (ALD). The ALD-grown oxide coatings exhibited enhanced mechanical properties, contributing to improved coating durability under demanding conditions. Moreover, compositionally engineered oxide architectures were fabricated through ALD supercycle sequences to further improve thermomechanical stability. In addition, post-deposition thermal treatment was introduced to control crystallinity and improve oxide/nitride interface stability. In conclusion, ALD enables uniform deposition of oxide hard coatings on complex three-dimensional tool geometries, thereby improving cutting performance and operational lifetime. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Surface Modification and Coatings, Thin Films and Interfaces, |