About this Abstract |
| Meeting |
MS&T25: Materials Science & Technology
|
| Symposium
|
Controlled Synthesis, Processing, and Applications of Structural and Functional Nanomaterials
|
| Presentation Title |
Systematic control of crystallization and phase transformation behavior of nanoscale NiTi films using seed layers |
| Author(s) |
Amirhossein Shafieizad, Axel Miranda, Jagannathan Rajagopalan |
| On-Site Speaker (Planned) |
Jagannathan Rajagopalan |
| Abstract Scope |
NiTi thin films are widely used as functional materials (sensors, actuators, switches, etc.) in micro/nano-electro-mechanical systems (MEMS/NEMS) due to their shape memory and pseudoelastic behavior. In these applications, it is important to limit the deposition/annealing temperature of the NiTi films to ensure compatibility with the overall MEMS/NEMS fabrication process. Here, we introduce a novel method to systematically control the crystallization temperature of amorphous NiTi films by using carefully selected seed layers. We show that there is a strong correlation between the lattice matching of the seed layer with the nucleating NiTi phase (Austenite) and the reduction in crystallization temperature. Furthermore, we show that the martensitic transformation temperatures of the NiTi films can be varied by employing different seed layers, thereby enabling us to tune the properties of the NiTi films for various applications. |