|About this Abstract
||Materials Science & Technology 2011
||MS&T'11 Poster Session
||120 Microsecond-Pulsed High Resolution Glow-Discharge Mass Spectrometer for Multielemental Nanometer Scale Depth Resolved Measurements of Thin Layered Structures
||Glyn Churchill, Xinwei Wang, Karol Putyera
|On-Site Speaker (Planned)
A highly sensitive analytical test method has been successfully developed for measuring trace element distributions in multilayered thin film structures with atomic layer depth resolutions. It is based on a new Ás-pulsed dc supply assembly, which is installed on a fast flow high power GD source and attached to a high resolution mass analyzer. This new assembly allows atomic layer determination of trace impurities at the boundary interfaces of thin layered structures such as photovoltaic films, with significantly improved signal/noise ratios.