| About this Abstract |
| Meeting |
Materials Science & Technology 2011
|
| Symposium
|
MS&T'11 Poster Session
|
| Presentation Title |
120 Microsecond-Pulsed High Resolution Glow-Discharge Mass Spectrometer for Multielemental Nanometer Scale Depth Resolved Measurements of Thin Layered Structures |
| Author(s) |
Glyn Churchill, Xinwei Wang, Karol Putyera |
| On-Site Speaker (Planned) |
Xinwei Wang |
| Abstract Scope |
A highly sensitive analytical test method has been successfully developed for measuring trace element distributions in multilayered thin film structures with atomic layer depth resolutions. It is based on a new µs-pulsed dc supply assembly, which is installed on a fast flow high power GD source and attached to a high resolution mass analyzer. This new assembly allows atomic layer determination of trace impurities at the boundary interfaces of thin layered structures such as photovoltaic films, with significantly improved signal/noise ratios. |
| Proceedings Inclusion? |
Undecided |