| Abstract Scope |
Ceramic functional-oxide thin films with enhanced functional properties, such as dielectric permittivity, tunability or electrocaloric effect, have been studied for different microelectronic applications, including thin film capacitors, tunable microwave devices or micro heating/cooling devices. In Chemical Solution Deposition (CSD) of thin films, crystallisation and evolution of microstructure depend on, and may therefore be tailored by the chemistry of the sol, the choice of the substrate, and by the processing conditions. The contribution addresses the design of microstructure through processing of selected dielectric, relaxor or ferroelectric perovskite thin films: lead lanthanum zirconate titante, and lead-free perovskites: calcium copper titanate, potassium tantalate, potassium tantalate niobate, and potassium sodium niobate; and the correlations found in individual material systems between the film microstructure and respective functional properties. |