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Meeting 2016 TMS Annual Meeting & Exhibition
Symposium 2016 Functional Nanomaterials: Emerging Nanomaterials and Techniques for 3D Architectures
Presentation Title Deposition and Characteristics of Al based Gate Dielectrics with Ozone Treatment for MoS2 Applications
Author(s) , Jaebeom Lee, Antonio T Lucero, Youngchul Byun, Jiyoung Kim
On-Site Speaker (Planned)
Abstract Scope Molybdenum disulfide (MoS2) is a promising 2D semiconductor with interesting electronic properties. However, it is challenge to fabricate high-quality high-k dielectrics on MoS2 due to its chemical inertness. In this work, alternative ALD process by employing ozone as precursor has been developed to achieve good sub-10 nm film uniformity. We investigated physiochemical interface properties and electrical performance of ozone-based high-k dielectrics grown on MoS2 surfaces. Our atomic force microscopy and low-energy ion scattering spectroscopy results show that thin and uniform Al2O3 films of ~ 5 nm can be achieved using TMA/ozone. The Raman spectra of monolayer MoS2 and ex-situ XPS investigations show no lattice disordering or changes to the chemical binding state of Mo element after ozone treatment at 200C, suggesting it has excellent chemical resistance to ozone. Electrical characterizations indicate no device performance degradations using TMA/O3-ALD in terms of field effect mobility, on/off ratio and current densities.
Proceedings Inclusion? Undecided

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

3-D Graphene Structures Synthesized by Catalyst-free Chemical Vapor Deposition
3-Dimensional Nanostructures in Bulk Monolithic Solids by Enhanced High Pressure Sintering
3D Pick and Place Sintering Nanoprinter
A Facile Fabrication of Fe2O3/C Composite as Anode for Lithium Ion Batteries
An Aluminum Based Amorphous/Nanocrystal Foil Composites Preparation
Anisotropic Photocurrent Response at Black Phosphorous-MoS2 p-n Heterojunctions
Characterization of Free-Standing NiTi Shape Memory Alloy Nanowires Fabricated by Nanoskiving
Controlled Synthesis of TiC Nanoparticles using Solid Oxide Membrane Technology in Molten CaCl2
Deposition and Characteristics of Al based Gate Dielectrics with Ozone Treatment for MoS2 Applications
DFT Study of Au-Ti Bimetallic Nanoparticle on TiO2 Support as Highly Active CO Oxidation Catalysts
Effect of SPD Surface Treatments on Corrosion and Environmental Cracking Susceptibility of Oilfield Alloys
Electron Beam Induced Deposition: A Direct Write Method for Nanoscale 3-Dimensional Architectures
Energy Conversion and Storage Applications of Mesoporous Titania Thin Films with Controlled Pore Orientation
Fabrication of Three Dimensional Carbon Nanotube - Nickel Nanofoam Heterostructures for Energy Storage Applications
Fabrication of Tubular Structures with Optimized Nanoporous Sandwich Walls
Ferroplasmons: Strong Plasmonic Resonances in Magnetic Nanoparticles
Flip-Chip GaN LEDs Using Photoelectrochemical Liftoff
From 2D to 3D: Smart Materials and their Combinatorial Structures for Advanced Applications
Gas-phase Condensation of Core-Shell Nanoparticles
High Throughput Reactive Printing Compatible Approaches for In-situ Manufacturing of Nanomaterials
Highly Uniform Synthesis of Large-Area, Few-Layer WSe2
Hybrid Nanostructures and Nanoarchitectures: Fundamentals and Applications
Hydrothermal Growth of ZnO Nanorod Arrays via Microsphere Self-assembled Monolayer for Nanocapacitor Application
Invited Talk: A Hybrid 3D Printing Technique for Laminated Polymer Nanocomposite Architectures
Invited Talk: Inorganic Infiltration in Polymer Templates via Atomic Layer Deposition: Pathway for Synthesis of Hybrid Materials and Direct Patterning Inorganic Nanostructures
Invited: Contact Thermal Resistance between Individual Nanostructures
Low Temperature Synthesis of Graphite on Ni Films Using Inductively Coupled Plasma Enhanced CVD
Morphological, Structural and Optical Characterization of Bottom up Growth of Ag-WO3 Core Shell Nano-cube Heterostructures
Multifunctional Self-cleaning Nanofiber Membranes for Water Filtration
Nano-manufacturing Process Using Electro-fountain Pen Nanolithography
Plasmonic Hot Electron Induced Photocurrent Response at MoS2-Metal Junctions
Preparation of MWCNT-supported Mo2C Nanocomposite Materials by Microwave Method for Applying in Direct Methanol Fuel Cells
Reduced Graphene Oxide/TiO2 Nanocomposite Based Electron Transport Layer for Perovskite Solar Cells
Reversible CO2 Capture from an Amidine Functionalized Polymer Thin Film
Scaled-Up Microscale and Nanoscale 3-D Electrochemical Printing of Solid Metal Structures
Self-Assembled Ultra High Strength, Ultra Stiff Mechanical Metamaterials Based on Inverse Opals
Shape Shifting Fullerene Self-Assemblies for Supercapacitor Applications
Simple Green Synthesis of Amino Acid Functionalised CdTe/CdSe/ZnSe Core-multi Shell with Improved Cell Viability for Cellular Imaging
Size-Dependence in Thermo-Mechanical Characterization of Multifunctional Nanocomposite Materials
Structural Study of Kinked B4C Nanowires
Synergistic Effects of Graphene Quantum Dot Sensitization and Nitrogen Doping of Ordered Nanoporous TiO2 Thin Films for Water Splitting Photocatalysis
Synthesis and Hydrothermal Method with Enhanced Photocatalytic Performance Optimization of Bi2S3 Nanorods
Synthesis of 3D Optical Metamaterials through Directional Solidification of Eutectics
Synthesis, Characterization and Sensing Properties of Palladium- Doped Tin Dioxide Nanocomposites
The Impact of Interfaces on the Integration of 2D Materials into Nanoelectronics
The Influence of Shape and Surface Chemistry on Solvated Nanodiamonds as Lubricant Additives
Three-Dimensional Imaging of Point Defects in Functional Materials Using Quantitative STEM
Titanium Dioxide Architects Made by Amorphous Building Blocks
V-1: A New Method to Produce CQDs by a One-step Thermal Decomposition
V-2: Facile Synthesis of Water-soluble Graphene Quantum Dots/Graphene Hybrid Nanoplatelets as Efficient Photodetector
V-3: Laser-Assisted Purification of Electron-Beam-Induced Deposits
V-4: Study of Radiation Grafting Polymerization of Poly (Acrylic Acid) onto Carbon Nanotubes Yarns Surface
V-5: Effect of Calcinating Temperature on the Structure and Performance of Fayalite@C Nanocomposites as Anode for Lithium Ion Battery
V-6: Thermal Enhancement with Multi-Walled Carbon Nanotubes in Transient Heating Applications

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