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Meeting 2018 TMS Annual Meeting & Exhibition
Symposium Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XVII
Presentation Title Microstructure and Optical Properties of Cr1-xAlxN Films Synthesized by Reactive Magnetron Sputtering
Author(s) Ting-Kan Tsai, Shu-Wei Yang, Yu Ru Li
On-Site Speaker (Planned) Yu Ru Li
Abstract Scope Cr1-xAlxN films contained different Al contents, x= 0.38, 0.52 and 0.66 at.%, were synthesized by DC reactive magnetron sputtering. Effects of the Al content on the microstructure and optical properties of Cr1-xAlxN films were studied. The X-ray diffraction analysis revealed that all of the Cr1-xAlxN films exhibited a B1 NaCl-type CrN structure. The Cr0.62Al0.38N film grown in a preferred orientation of (220) and the growth orientations of Cr0.48Al0.52N and Cr0.34Al0.66N turned into (220), (200) and (111). The surface morphology of Cr1-xAlxN films varied from pyramid-like shape to fine granular shape when the Al content was increased to 0.66 at.%. The measurements of refractive index and extinction coefficient showed that the dielectric property of CrAlN increased with increasing the Al content in Cr1-xAlxN films. The optical energy gap increased from 1.85 eV to 2.5 eV when the Al content of Cr1-xAlxN films was increased from 0.38 to 0.66 at.%.
Proceedings Inclusion? Planned: Supplemental Proceedings volume

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