Parylene is known for its biocompatibility and additionally possesses excellent barrier, dielectric, pin hole free, conformable, and other desired properties. It is deposited on the substrate at room temperature using the chemical vapor deposition technique. Therefore, it has immense potential with area of applications widely spread out to biological, corrosion, electronic, micro-electro-mechanical systems (MEMS), microfluidics and BioMEMS including developing novel devices. In this paper we will be presenting the results of surface modification of these films where the roughness is tailored by innovative methods in the nanometer regime. The modified surfaces will be characterized by scanning electron microscope, optical profiler, contact angle measurements, atomic force microscope, and/ or biological cells. Additionally, we will be discussing the developing of the devices using parylene coatings.