In this study, a finite element simulation of sliding on a diamond coating deposited on a carbide substrate was applied to investigate dominant factors to coating delamination. Different parameters including coating thickness, elastic modulus of the coating, fracture energy of the interface, and indentation depth have been arranged for a 2-level factorial design with a constant load during sliding process. Minitab was employed to analyze the individual and interaction effects of the parameters from the simulation results. The results show that the fracture energy has the most significant effect on the crack width and length. In addition, the crack width is more sensitive to other parameters at a lower fracture-energy value. The coating elastic modulus has little effect on the crack length and crack width. The interaction between the coating thickness and the indentation depth has a dominant effect on the crack width and crack length.