|About this Abstract
||Materials Science & Technology 2011
||MS&T'11 Poster Session
||177 Influence of Plasma Species on the Surface Properties of Titanium Treated Thermochemically by Plasma N2-Ar-O2
||Danilo Cavalcante Braz, Júlio Cesar Pereira Barbosa, Jussier de Oliveira Vitoriano, Thiago Victor Rodrigues de Medeiros, Arlindo Balbino Nascimento Neto, Clodomiro Alves Junior
|On-Site Speaker (Planned)
||Júlio Cesar Pereira Barbosa
In this study, active species such as N2+ (391.4) and O (842.6) were analyzed by optical emission spectroscopy (OES) in plasma produced by an N2 - Ar - O2 gas mixture. Argon and nitrogen flux was fixed at 4 and 1 sccm, respectively and oxygen flux ranged between 2 and 4 sccm. It was observed that active species influenced surface properties after thermochemical plasma treatment. Roughness was lower when species were more energetic. However, there was competition between erosion and deposition mechanisms associated to concentrations of N2+ (391.4) and O. Surface tension measurements were higher for more energetic plasma. While N2+ most influenced the dispersive component, O had the greatest influence on the polar component. Hardness was higher at greater N2+ (842.6) concentrations. Maximum optical reflectance on surfaces treated by more energetic plasma shifted slightly to longer wavelengths in comparison with the other conditions.