|About this Abstract
||2017 TMS Annual Meeting & Exhibition
||Characterization of Minerals, Metals, and Materials
||Important Factors to Consider in FIB Milling of Crystalline Materials
||Jian Li, Pei Liu
|On-Site Speaker (Planned)
In recent years FIB has become an important microscopy and microanalysis instrument. In the field of materials research, it has been widely used to perform ion beam sectioning and site-specific TEM specimen preparation. However, there has been lack of understanding of FIB induced artifacts. Gallium ion beam damage and the specimen heating during FIB milling can produce unwanted artefacts during FIB work. Calculations of maximum specimen temperature increase have mostly been based on the assumption that ion beam implantation into substrate of infinite size. This deviates from finite specimen volume in FIB TEM specimen preparation that impedes heat dissipation. In this paper, the authors will summarize common FIB artifacts and make an effort to discuss the concerns of specimen temperature rise in FIB specimen preparation process.
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