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Meeting 2022 TMS Annual Meeting & Exhibition
Symposium Self-organizing Nano-architectured Materials
Presentation Title Magnetic Nanopillars by Self-assembled Block Copolymer Templating
Author(s) Alecsander Mshar, Daniel Arnold, Oreoluwa Rebecca Agede, Allen G. Owen, Subhadra Gupta
On-Site Speaker (Planned) Alecsander Mshar
Abstract Scope A designed experiment was conducted using self-assembled block copolymers to pattern multiple nanolayers of cobalt and palladium. Nanolayers ranging from four to twelve bilayers of Co (0.3 nm)/Pd (1 nm) were sputtered onto silicon wafers. The block copolymer, PS-PFS, was dissolved in toluene and spun onto the wafers. After heat treatment to phase separate the polymers, the PS was removed by oxygen plasma ashing. The remaining polymer, PFS, formed self-assembled spheres that were utilized as masks to ion mill the Co/Pd nanolayers as a function of etch time and etch angle. Scanning electron micrographs showed nanopillars ranging from 10 to 30 nm in diameter. Magnetic measurements carried out on both patterned and unpatterned wafers of these perpendicular magnetic anisotropy nanolayers and nanopillars showed an increase of 113% in coercivity after patterning. An overview of various perpendicular magnetic anisotropy materials patterned by this technique will be discussed.
Proceedings Inclusion? Undecided
Keywords Magnetic Materials, Thin Films and Interfaces, Characterization

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