The none-equal Molar AlCoCrFeNiTi high entropy alloy, containing FCC γ matrix and L12 γ' precipitates, was heavily deformed and annealed at different temperature. Cellular structure incubated and grow in shear band below recrystallization temperature. This cellular structures were also observed in nickel-base superalloys. The γ/γ' microstructure in the recrystallized area is much coarser than spherical γ' embedded in γ matrix, thus leading the reduction of γ/γ' interface and degrading of precipitates hardening effect. However, these structures could be eliminated by slow cooling process. As annealing treatment at 1000 oC just below the γ' solvus for different duration shows fall-first-and-rise-later hardness, it is due to dissolving of the precipitates into the migrating grain boundary which caused by static recrystallization, and then subsequently reprecipitating behind the moving boundary. However, this effect is much less pronounced below the annealing temperature of 1000 oC due to sluggish diffusion, which was lower mobilityof grain boundary.