|About this Abstract
||2018 TMS Annual Meeting & Exhibition
||Recent Developments in Biological, Structural and Functional Thin Films & Coatings
||Characterization and Performance Evaluation of Titanium Doped β-Ga2O3 Thin Films for Oxygen Sensors in Extreme Environment
||Sandeep Manandhar, Anil Battu, Chintalapalle Ramana
|On-Site Speaker (Planned)
Increasing demand for energy has created a grand challenge of enabling efficient power generation system. While sensors and controls can play a role in monitoring and controlling combustion environment and emissions, finding suitable materials that can operate at the extreme conditions is a major technological challenge. In this work, we focus on the fabrication, characterization and performance evaluation of titanium (Ti) doped gallium oxide (Ga2O3) thin films (referred to GTO) for application in oxygen sensors. An in-depth study was performed on GTO sensors to improve response time and sensitivity of β-Ga2O3. The real environment condition for sensor (>700°C) application were simulated to understand the effect of temperature on the crystal structure, mechanical properties, electronic properties and oxidation states of Ti doped β-Ga2O3. The results will be presented and compared with as prepared Ti doped β-Ga2O3 films in the context of utilizing these materials in oxygen sensor applications.
||Planned: Supplemental Proceedings volume