|About this Abstract
||2018 TMS Annual Meeting & Exhibition
||Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XVII
||Effects of Electrochemical Parameters on the Physical Properties of Ni-Co Electroplating
||Yong-Su Lee, Hong-Wook Chun, Jaeho Lee
|On-Site Speaker (Planned)
Probe card is one of reliability testing tool in semiconductor system. MEMS technology is used in MEMS probe tip fabrication. As the size of semiconductor is getting smaller, the size of probe tip is decreased. Since the reliability of probe is dependent on the physical property of probe tip, the hard and wear resistant material is used. Ni-Co alloy is one of the candidate material for this purpose. Ni-Co probe tip is fabricated through electroplating method. In this study the effect of plating bath conditions on the Ni-Co electroplating is investigated. Ni-Co is one of the anomalous plating and it is not easy to predict. The relationship between concentration of Co and contents of coating is investigated. The effects of current density on Ni-Co electroplating is also investigated. The surface hardness and crystallography of coating is measured and compared.
||Planned: Supplemental Proceedings volume