|About this Abstract
||2017 TMS Annual Meeting & Exhibition
||Characterization of Minerals, Metals, and Materials
||A Forward Modeling Approach to Defect Characterization in a Scanning Electron Microscope
||Saransh Singh, Marc De Graef
|On-Site Speaker (Planned)
Defects have traditionally been studied in a TEM using one of many techniques, including bright/dark field imaging, weak beam imaging etc. Recently, Electron Channeling Contrast imaging (ECCI) has been shown to be a viable alternative to the TEM based methods and offers some advantages in sample preparation and the study of bulk samples. In this contribution, we present a forward model approach to defect characterization in an SEM. A forward model for Electron Channeling Patterns (ECP) will be presented. The forward model is combined with the dictionary approach to index ECPs for quantitative studies, such as g.b analysis. Finally, the forward model is extended to simulate arbitrary defects using the ECCI modality. We will present some results of defect simulation in structural materials and semiconductors. We will also discuss the efficient implementation of these routines on the massively parallel GPU architecture as part of the open source EMsoft project.
||Planned: Stand-alone book in which only your symposium’s papers would appear (indicate title in comments section below)