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Meeting 2016 TMS Annual Meeting & Exhibition
Symposium General Poster Session
Presentation Title OO-12: Development of Innovative Barrierless Cu-Alloy Films for Various Applications
Author(s) Chon-Hsin Lin
On-Site Speaker (Planned) Chon-Hsin Lin
Abstract Scope We fabricated an innovative barrierless Cu-alloy film for use as a reliable interconnect. In microelectronic devices, Cu diffuses rapidly into the Si layer, deteriorating the device properties and necessitating a diffusion barrier between Cu and Si to prevent device failure. Furthermore, the synthesized Cu-alloy films remain stable when used as a buffer layer and do not dissolve the solder even when reactions occur at the interface. Our results are expected to facilitate development of innovative low-resistance metallic materials with good adhesive properties, which in turn would be useful in barrierless Cu-metallization applications. We measured the film resistivity and current–voltage characteristics of the seed layer and assessed the reliability of the seed layer in Cu interconnects by studying the long-term aging characteristics between Sn and Si. The results reveal that the fabricated Cu-alloy film exhibits high thermal stability.
Proceedings Inclusion? Planned: A print-only volume


OO-10: Current Status of Characterization of RPV Material from Decommissioned Zion NPP
OO-11: Damping Capacity of TiCuNiSiSn Super-elastic Alloy
OO-12: Development of Innovative Barrierless Cu-Alloy Films for Various Applications
OO-13: Development of the Non-contact Surface Make with the Inorganic Binder Using on the Low Melting Point Molten Metal Reaction
OO-14: Effect of Composition on the High-Temperature Strength of Several Model Ni-Base Alloys
OO-15: Effect of Dopants on Barium Calcium Zirconate Titanate Piezoelectric Ceramics
OO-16: Effect of Pulsed Magnetic Field on Microstructure of Grain-Oriented Silicon Steel during Primary Recrystallization Process
OO-17: Effect of Temperature on the Mechanical Behaviour of NiTi Shape Memory Sheets
OO-18: Effects of Laser Heating on HY80 Steel
OO-19: Effects of Resistance Spot Welding on the Mechanical Properties in High Strength Steels
OO-20: Evaluation of Forged Aluminum Matrix Composites Reinforced with Carbon Nanotubes(CNTs) Fabricated by Composite Gas Generator(CGG) Process
OO-21: Gamma and Neutron Shielding Behavior of Spark Plasma Sintered Boron Carbide-Tungsten Based Composites
OO-22: Grain Boundary Mechanics in Nickel-based Superalloys
OO-23: Green Synthesis of Fe Nanoparticles Using Ruta Graveolens Leaf Extracts for Possible Treatment of Wastewater
OO-24: High Strength Aluminum Alloy Applied Development of the Explosion-proof Lamp Housing through a Vacuum Die Casting Process
OO-25: Image Analysis Investigating Porous Structures of Carbon Cathodes Materials and Melts Penetration
OO-26: Inhibition of Stainless Steel Corrosion in 0.5 M H2SO4 in the Presence of C6H5NH2
OO-27: Investigation of Process Parameters for the Nickel Coatings from Sulphamate Baths
OO-28: Investigation of the Corrosion Behavior of Selected Steel Types and Aluminum Alloys in Marine Environment
OO-29: Investigation of the Impact of Grain Size on the Oxidation Behavior of NiCrAlY Alloys
OO-2: A Study of Taguchi Method to Optimize 6060 series Aluminum Anodic Oxide Film’s Hardness and Investigation of Corrosion Behaviors of Oxide Films
OO-30: Investigation of the Influence of Grain Refinement on the Oxidation Behavior of NiAl-Hf Alloys
OO-31: Micro-truncated Cone Arrays for Light Extraction of Organic Light-emitting Diodes
OO-33: Microstructure and Mechanical Properties of TiC-reinforced Steel Matrix Composite
OO-34: Microstructure of Heat Treated Selective Laser Melting Manufactured Ti-6Al-4V
OO-35: Mould Filling Ability Characterisation of SIMA Produced 6063 Alloy
OO-36: Multi-layer Resistance Spot Welding in Advanced High Strength Steel
OO-37: Non-stoichiometry of Uranium Oxides
OO-38: One-step Preparation of TiB2-C Composite by DC Arc Furnance
OO-39: Preparation of Core-sheath Eletrospinning Polyacrylonitrile Fibers
OO-3; Anisotropic Effects of the Bi2Te3 Crystal Orientations on the Bi2Te3/Sn Interfacial Reactions
OO-40: Preventing Molten Metal Explosions
OO-41: Production and Characterization of Fe-based Glassy Composite
OO-42: Property Evaluation and Fabrication of L7L3Z2O12 Compacts for Solid Electrolyte by a Spark Plasma Sintering Method
OO-43: Recycling System of Waste Home Appliances in Korea
OO-45: Semiconductor Core Optical Fiber for Mid IR Wavelength Transmission
OO-46: Si and SiCu Three Dimensional Sculptured Films as Negative Electrodes for Rechargeable Lithium Ion Batteries
OO-47: Studies on Corrosion Characteristics of Superalloys in Different Environment
OO-48: Sustainability of Alumina
OO-49: Tape Casting of Uranium Dioxide
OO-4: Anticorrosion Performance of Solanum aethiopicum on Steel-Reinforcement in Concrete Immersed in Industrial/Microbial Simulating-Environment
OO-50: The Effect of Additive V2O5 on Sinter Mechanism and Properties of Inert Anode of NiFe2O4 Spinel
OO-51: The Physico-mechanical Properties of Mg Alloy Reinforced with AlN Nanoparticles
OO-52: Thickness Effect on the Three-Dimensional Sculptured SiCu Thin Films Used as Negative Electrodes in Lithium Ion Batteries
OO-53: Fabrication of Electrochromic Window Using Nano Particle Deposition System (NPDS) with Ionic Liquid Electrolyte
OO-54: Topology of the Decomposition of Ammonium Arsenojarosite in Alkaline Medium
OO-55: Tribological Properties of Aluminium-Clay Composites for Brake Disc Rotor Applications
OO-56: Partial Repair and Restart of a Damaged Aluminium Reduction Cell
OO-57: Variation of Emotional Color of Copper Alloys with Its Surface Morphology and Reflectivity of the Wavelength
OO-58: Development of Die-casting Aluminum Alloy with High Thermal Conductivity for Cylinder Head
OO-5: Anticorrosive Zr and Zn Coatings on a Pre-Oxidized 304L Steel Surface
OO-6: Applications of Infrared Thermography Technology in Railway Components for Advanced Characterization
OO-7: Behavior of Tire Derived Pre-Functionalized Carbon Black for Uranium Adsorption
OO-8: Bulk Metallic Glass Composite with Good Tensile Ductility, High Strength and Large Elastic Strain Limit

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