| About this Abstract |
| Meeting |
2016 TMS Annual Meeting & Exhibition
|
| Symposium
|
2016 Functional Nanomaterials: Emerging Nanomaterials and Techniques for 3D Architectures
|
| Presentation Title |
Electron Beam Induced Deposition: A Direct Write Method for Nanoscale 3-Dimensional Architectures |
| Author(s) |
Brett B. Lewis, Robert Winkler, Jason D. Fowlkes, Michael G. Stanford, Harald Plank, Philip D. Rack |
| On-Site Speaker (Planned) |
Brett B. Lewis |
| Abstract Scope |
Electron Beam Induced Deposition (EBID) is a technique uniquely suited to construct complex 3-D nanostructures with a diverse range of geometries and materials. EBID uses a focused electron beam to stimulate the reaction of precursor molecules adsorbed onto a substrate and can deposit a variety of materials depending on the precursor chemistry. The ability to direct write nanostructures without lithographic masks or resists with a high degree of precision paves the way for the simple construction of geometries that are otherwise extremely difficult or impossible to fabricate. One immediate application of this technique is the unique study of plasmonic nanostructures whose properties are significantly affected by shape. Here we illustrate how various parameters affect the 3-D growth of platinum nanostructures from the (CH3)3CH3C5H4Pt precursor. Experimental and simulation results will be compared in order to elucidate the range of possible shapes and parameters necessary to construct them. |
| Proceedings Inclusion? |
Undecided |