|About this Abstract
||Materials Science & Technology 2011
||MS&T'11 Poster Session
||079 Lab Scale Non-Destructive Compositional Analysis of PZT RF Sputtered Thin Films
||Ron Varghese, Greg Pribil, Shashank Priya
|On-Site Speaker (Planned)
In this study, we propose a methodology to relate the elemental composition of a thin film to its optical dispersion properties. Erstwhile, Gladstone-Dale relationships have been used in optical mineralogy to relate density of crystalline compounds to their average refractive index. We use a ‘reverse’ Gladstone Dale approach and determine the composition of multi-component thin films from their optical properties. The wavelength dispersion of refractive index and extinction coefficient of various Pb(Zr,Ti)O3 (PZT) thin films was measured using Variable Angle Spectroscopic Ellipsometry (VASE). Elemental compositions were measured qualitatively using Energy Dispersive X-ray analysis (EDX) and quantitatively using Electron Probe Micro Analysis (EPMA). The coefficients from the non-linear curve fits of the Tauc plots of thin film absorption vs. energy were then regressed against the elemental content of Pb, Zr and Ti in the thin film. Such empirically and statistically derived models can be utilized in the lab for the non-destructive compositional analysis of a single layer non-opaque thin film system.