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Meeting 2018 TMS Annual Meeting & Exhibition
Symposium Recent Developments in Biological, Structural and Functional Thin Films & Coatings
Presentation Title Structural and Optical Properties of Tungsten Doped Hafnium Oxide Nanocrystalline Thin Films
Author(s) Marlyn Torres, Ann Uribe, Chintalapalle Ramana
On-Site Speaker (Planned) Marlyn Torres
Abstract Scope Hafnium oxide (HfO2) is a high temperature refractory material with a high chemical stability, wide band gap (Eg ~5.7 eV) and a high dielectric constant (k ~25). While there are efforts in the literature on the effect of metal doping (such as Al, Cu) to tune the structural and electronic properties of HfO2 films, not much is known about tungsten (W) doping effects into HfO2. However, doping the refractory metal (such as W) into a hard dielectric (HfO2) will have implications to design materials and devices for advanced device applications. In the present work, W-doped HfO2 thin films were deposited by radio frequency magnetron sputtering, where the amount of W into HfO2 is varied. X-ray diffraction (XRD) studies indicate the predominant (-111) peak of the monoclinic HfO2, while the incorporation of W induces amorphization. Based on the experimental data and analyses, a structure-composition-property relationship in W-doped HfO2 films is established.
Proceedings Inclusion? Planned: Supplemental Proceedings volume

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Control of Thin MoSe2 Layer in Cu(InGa)Se2-based Thin Film Solar Cell
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Coupling Electronic Structure to Atomistic Simulations for a Multi-scale Modelling of Realistic Materials
Decoration of Carbon Nanostructures by Metal and Metal Oxide Nanoparticles
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Effect of Interaction of CO Gas Molecules on Schottky Barrier Modulation of Pt-SnO2 Nanostructure Device
Effect of Refractory Metal Incorporation on Structural and Mechanical Properties of β-Ga2O3 Nanocrystalline Films for Extreme Environment Applications
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Examining the Long-term Adhesion Strength of Chitosan Bonded to Titanium when Exposed to the Atmosphere or Simulated Body Fluid
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Formation & Characterization of Black Silicon by Reactive Ion Etching
Functional Thin Film Enabled Sensor Technologies for Harsh Environment Sensing Applications
Functionalization of Thermoset Composite Surfaces for Welding Technologies
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Nickel Oxide Thin Film Based Electrode for Cholesterol Monitoring Using Electrochemical Biosensor
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Selective Oxidation of Tool Steel Surfaces under Protective Gas Atmosphere
Shaping of Ti/PMMA Sandwich Sheets for Biomedical Applications
Stresses and Strains Effect on Light Emission from Indirect-bandgap Semiconductors
Structural and Optical Properties of Tungsten Doped Hafnium Oxide Nanocrystalline Thin Films
Tunable Optical Constants and Solar Selectivity of Multilayer Films for Smart Window Applications
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