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Meeting 2018 TMS Annual Meeting & Exhibition
Symposium Frontiers in Advanced Functional Thin Films and Nanostructured Materials
Presentation Title Effect of Process Parameters on Phase Stability and Metal-insulator Transition of Vanadium Dioxide (VO2) Thin Films by Pulsed Laser Deposition (PLD)
Author(s) Ryan McGee, Ankur Goswami, Kalvin Schofield, Thomas Thundat
On-Site Speaker (Planned) Ryan McGee
Abstract Scope The thermally induced (Tc=340K) phase transition in VO2 from low temperature monoclinic to high temperature tetragonal is accompanied by an abrupt change in the electronic and optical properties. Controlling the synthesis of the correct phase is a major issue with VO2 production due to the immense number of vanadium oxides. Here we provide detailed insight into the influence of PLD process variable on the deposition of VO2. Utilizing the Taguchi method, we studied the synergistic effect of gas pressure, substrate temperature, target-substrate distance, and laser energy on the phase formation and stability of VO2 films on Si/SiO2 substrates. We stabilized three major polymorphs of VO2; monoclinic, tetragonal, and triclinic. Evidence of the MIT was indicated by a sudden decrease in resistance at 50-60 C, which was highly dependant on processing. Further Taguchi analysis elucidated the effect of each process variable on films roughness, thickness, and grain size.
Proceedings Inclusion? Planned: Supplemental Proceedings volume

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

A New Approach to Align CNTs in CNT Films
A Structural Analysis of the Epitaxial Ni/VO2 Heterostructure Integrated on Si(001)
An Investigation of the Relationship between Mechanical and Optical Properties of Transparent Metal Oxide Multilayers
Anisotropic Magnetic Properties in BiFeO3/SrRuO3 and La0.7Ca0.3MnO3/SrRuO3 Heterostructures
Characterizing Nitrogen-vacancy (NV) Centers in Diamond Nanostructure Formed by Pulsed Laser Annealing Technique at Room Temperature and Ambient Pressure
Control of Nucleation of 3C-SiC Utilizing Screw Dislocations in 6H-SiC
Defects in Nanoscale Transitional Metal Di-chalcogenide Semiconducting Layers
Diamond Epitaxy for High Power and High Temperature Electronics
Discovery of Ferromagnetism and High-temperature Superconductivity in Q-carbon (Plenary Talk)
Effect of Geometrical Defects on Thermal and Mechanical Properties of Metal-coated Multi-walled Carbon Nanotubes
Effect of Interface Thickness on Mechanical Properties in Glass-epoxy Composite
Effect of Process Parameters on Phase Stability and Metal-insulator Transition of Vanadium Dioxide (VO2) Thin Films by Pulsed Laser Deposition (PLD)
Engineering Elastic Strain Gradients to Tune the Electrical Properties of Semiconductors for Thermoelectric Applications
Epitaxial Growth of Advanced Ceramic and Metal Films
Functionalization of Transparent Oxide Thin Films Using Silicon Doped Nanoparticles
Functionalized Graphene-polyoxometalate Nanodots Assembly as “Organic-inorganic” Hybrid Supercapacitors and Advanced Electrochemical Microscopy
Graphene Film Nano Geometry Control for Advanced Functional Properties
Graphitization and Growth of Free-standing Nanocrystalline Graphene Using In Situ Transmission Electron Microscopy
High-temperature Carbon-based Superconductors: B-doped Q-carbon
How Good those are Mechanically Exfoliated MoS2 Mono Layered Devices at the Atomic Level?
Hydrogen Plasma Annealing of E-Beam Evaporated SiO2 Tunnel Barriers
Kinetic Modeling of the Structural Transition in VO2 Thin Films
Magnetic Anisotropy in Ni/VO2 Heterostructures
Materials Science in Two Dimensions
Nanoscience and Nanotechnology Using Energetic Ion Beams/Gamma Radiation/Lasers
Nanostructure Synthesis by Pulsed Laser Melting
Nitrogen Vacancy Induced Room-temperature Ferromagnetism in TiN Epitaxial Thin Films via Ultrafast Laser Melting
Novel Synthesis and Characterization of Carbon-doped Cubic Boron Nitride (c-BN) by Pulsed Laser Annealing Technique
Oxide Epitaxy with Large Mismatch: Bronze-phase VO2 on SrTiO3
Physiochemical and Antioxidant Properites of CNPs Modulated by Anions of the Precursor
Point Defect Energetics at Oxide Heterointerfaces
Processing and Properties of Nanomaterials in the C-B-N System
Q-carbon Tribological Coatings on WC and Tool Steel
Stabilization of Nanocrystalline Grain Size at Elevated Temperatures: Theory and Experiment
Structures and Mechanical Behavior of Metal-metal Nitride Nanolayered Films
Superhard Q-carbon Nanostructures Formed via Nanosecond Laser Melting and Ultrafast Quenching
Superlattices of Heusler Alloys for Engineering Magnetism and Electronic States
Synthesis and Mechanical Behavior of a Freestanding, Nanocrystalline NiTi Film under Cyclic Tensile Deformation
Thin Film and Coatings for Biomaterials Applications
Unravelling Defects in Hybrid Perovskite Solar Cell Structures

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