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Meeting 2018 TMS Annual Meeting & Exhibition
Symposium Perfluorocarbon Generation and Emissions from Industrial Processes
Presentation Title PFC Emission Reduction in the Semiconductor Industry
Author(s) Michael Roger Czerniak
On-Site Speaker (Planned) Michael Roger Czerniak
Abstract Scope Semiconductor chips are found in nearly everything today, and with the rise of the Internet of Things, they will appear in even more things! The manufacture of these devices requires the use of PFC gases, which are used as a convenient source of fluorine for material removal purposes, both in etch processes (where typically silicon is selectively removed through a photolithographic mask) and chemical vapour deposition (CVD, where typically thin layers of silicon are deposited – fluorine-based gas chemistry is subsequently used to remove collateral deposits from the process chamber walls). The industry, under the auspices of the World Semiconductor Council (WSC), recognised that PFC’s were powerful GHGs at an early stage and proposed voluntary reductions in emissions, initially with a 2010 timeline, and subsequently 2020. This presentation considers these factors and the measures that manufacturers can deploy towards achieving these industry expectations.
Proceedings Inclusion? Planned: Light Metals


An Estimation of PFC Emission by Rare Earth Electrolysis
Attributing PFC Emissions to Different Industries: How Bottom-up Trends Can Complicate Top-down Analyses
Challenges in Estimating Global CF4 and C2F6 Emissions
Conditions and Mechanisms of Gas Emissions from Didymium Electrolysis and Its Process Control
Evaluation of Time Consistency when Quantifying Emissions of Perfluorocarbons Resulting from Low Voltage Anode Effects
Fluorinated Gas Production: Underestimated Source of PFCs?
Low Voltage PFC Measurements and Potential Alternative to Reduce Them at Alcoa Smelters
Methodologies to Measure Greenhouse Gas (GHG) Emissions from Industrial Processes and Determine the GHG Emission Factors
New Algorithm for Calculating CF4 Emissions from High Voltage Anode Effects
New Approach for Quantification of Perfluorocarbons Resulting from High Voltage Anode Effects
Perfluorocarbon Formation during Rare Earth Electrolysis
PFC Emission Reduction in the Semiconductor Industry
PFC Evolution Characteristics during Aluminium and Rare Earth Electrolysis
PFCs from the Chinese Aluminium Sector – Challenges in Emissions Accounting and Further Characteristics
Updated Factors for Calculating PFC Emissions from Primary Aluminum Production
Validation of Online Monitoring of PFC by QCL with FTIR Spectroscopy

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