ProgramMaster Logo
Conference Tools for MS&T22: Materials Science & Technology
Login
Register as a New User
Help
Submit An Abstract
Propose A Symposium
Presenter/Author Tools
Organizer/Editor Tools
About this Abstract
Meeting MS&T22: Materials Science & Technology
Symposium Advances in Emerging Electronic Nanomaterials: Synthesis, Enhanced Properties, Integration, and Applications
Presentation Title Molecular Modeling of Atomic Layer Etching
Author(s) Shenli Zhang, Yihan Huang, Gulcin Tetiker, Saravanapriyan Sriraman, Roland Faller
On-Site Speaker (Planned) Roland Faller
Abstract Scope With the decrease of electronic device size down to the atomic scale, the variability of surface patterning needs to be controlled within dozens of atoms. Plasma etching is an essential surface patterning technique. Conventionally, it is realized by ionizing non-reactive species such as Ar to transfer energy to the surface, and parallel another reactive species such as Cl2 etches the surface either in its neutral or ionized state. New methods are needed to meet the requirement of precise etching control at the atomic scale, and atomic layer etching (ALE) has been proposed as one solution. We present a computational study of atomic layer etching of chlorinated germanium surfaces under argon bombardment using molecular dynamics with a newly fitted potential. The chlorination energy determines the threshold energy for etching and the number of etched atoms in the bombardment phase. We show how the etch rate is determined by bombardment energy.

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

Applications of Electron Spectro-microscopy to Investigations of Chemistry and Electronic Structure of 2D Materials
Area Selective Atomic Layer Deposition of Silicon Oxide Using an Oxygen Plasma or Ozone with Copper as the Nongrowth Surface
Area Selective Deposition of TaN for Back End of the Line Applications
Correlative Analyses of Low-dimensional Materials
First-Principles Studies of Atomic Layer Deposition
From Atomic-scale Characterization to Atomic-scale Control of Thin Film Deposition Processes
H-1: A Molecular Dynamics Study of Additive Nanomanufacturing: Revealing Sintering Mechanisms
H-2: Optical Engineering of Pbs Colloidal Quantum Dot Solar Cells Via Fabry-Perot Resonance and Distributed Bragg Reflectors
H-4: Study on Nanostructured Molybdenum Carbide for Hydrogen Evolution Reaction
H-5: Toward Scalable Fabrication of Stable Metal Halide Perovskite Solar Cells Through Inkjet Printing and Antisolvent Bathing
How to Achieve State-of-the-art Heterostructures from Polymer-contaminated Graphene?
Hybrid Liquid Metal Nanostructures for Electronics and Energy Applications
Ions in PEALD Processes: from Material Modification to Selective Deposition
Meta-Stable Phase Ferroelectric HfZrO2 Films
Microelectronics Application of Vapor-phase infiltration – Atomic Layer Deposition Derived Organic-Inorganic Hybridization Technique
Molecular Modeling of Atomic Layer Etching
Nanomaterials for Energy-efficient Memory Devices
Nanomolding of Topological Nanowires
Near-Band-Edge Enhancement in Perovskite Solar Cells via Tunable Surface Plasmons
Novel Dirac-source Cold Carrier Injection for Energy-efficient 2D Nanoelectronics
Raman Spectroscopy Studies of Magneto-optical Effects in CrI3
Resolving the Evolution of Atomic Layer Deposited Thin Film Growth by Continuous In Situ X-ray Absorption Spectroscopy
Solution Processible Carbon Precursors for 2D Amorphous Carbon Dielectric
Stable Perovskite Solar Cells
Synthesis and Integration of Transition Metal Dichalcogenides
Synthesis of Atomically Precise Graphene Nanoribbons with Tunable Electronic Properties
Synthesis, Nanofabrication and Characterization of 2D Magnetic Semiconductors for Magnetic Tunnel Junctions
Two Dimensional Materials for Neuromorphic Computing
Unique Molecular Approach to 2D Tin Chalcogenide Materials by Single-Source Precursor Design
Wafer-scale Heterogeneous Integration of Atomically Thin Electronic Materials on Arbitrary Substrates toward Mechanically Reconfigurable Devices

Questions about ProgramMaster? Contact programming@programmaster.org