Low temperature cofired ceramic (LTCC) electronic packaging materials are applied for their electrical and mechanical properties, high reliability, stability and ease of fabrication. Three dimensional features can also be prepared allowing integration of microfluidic channels and cavities inside LTCC modules. Clark-type oxygen sensors are electrochemical devices consisting an oxygen-permeable membrane, electrolyte, working, reference and counter electrodes. Clark-type oxygen sensors are widely used in clinical analysis, monitoring, and biosensor development. Integration of Clark-type sensor into LTCC devices will enable measurement of the dissolved oxygen concentration in the local microfluidic environment. A Clark-type sensor has been fabricated using a combination of thick film and electrochemical processes. Cyclic voltammograms will be measured to determine the electrochemical properties of oxygen reduction in the LTCC oxygen sensor. The prepared LTCC Clark-type oxygen sensors can be further applied for the evaluation of the cellular respiration for microfluidic cell culture studies.