|About this Abstract
||2018 TMS Annual Meeting & Exhibition
||Recent Developments in Biological, Structural and Functional Thin Films & Coatings
||H-13: Zinc Oxide Thin Film as a Guiding Layer for Love Wave Acoustic Biosensors
||Lokesh Rana, Reema Gupta, Monika Tomar, Vinay Gupta
|On-Site Speaker (Planned)
Rayleigh wave based Surface Acoustic Wave (SAW) devices find application in filters, resonators, oscillators and delay lines etc. On integrating suitable sensing layer over Rayleigh wave based devices, they can be used for the fabrication of gas sensors, UV detectors and magnetic field sensors. However, these sensors suffer from the disadvantage of the wave being damped on interaction with fluids. In order to overcome this problem, shear horizontal (SH) wave based SAW devices, known as Love wave acoustic devices, are preferred with a suitable guiding layer over them. In the present work, SH wave based devices have been fabricated on 36°YX Lithium tantalate. Growth conditions for deposition of ZnO thin film functional layer have been optimized (60:40 O2:Ar gas ambient, 30 mTorr pressure) to obtain low acoustic losses. The fabricated devices have been used successfully for biosensing applications for detection of analytes such as uric acid with enhanced response characteristics.
||Planned: Supplemental Proceedings volume