|About this Abstract
||2018 TMS Annual Meeting & Exhibition
||Thermo-mechanical Response of Materials with Special Emphasis on In-situ Techniques
||Studying Tensile Properties of Silicon via In-situ Microcompression Testing of Push-to-pull Pillar
||Ming Chen, Ralph Spolenak, Jeffrey Wheeler
|On-Site Speaker (Planned)
Rapid advances in nanotechnology enable the investigation of thermo-mechanical properties of micro/nano-fabricated semiconductors being routinely utilized as building blocks and functional components. However, these materials are vulnerable to the fabrication process and sensitive to the methodology of testing. In this study, In Situ micro-tension testing is realized via conducting compression on Si push-to-pull (PTP) pillar in the temperature range of 25~600°C. The deformation processes of PTP pillar are firstly simulated by fine element modelling to guide the design of a proper geometry with an uniaxial stress state at the tensile region. Pillars are In situ tested to quantitatively evaluate the plasticity of Si as a function of sample size and crystalline orientation. The distribution of strain and stress are measured using Raman microscope to evaluate the effect from the geometry of PTP pillar on plasticity and size effect in Si.
||Planned: Supplemental Proceedings volume