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Meeting Materials Science & Technology 2019
Symposium Data Science for Material Property Interpretation
Presentation Title 3D Nanoprinting: An Integrated Approach of Experiments, Computer-aided Design and Simulations
Author(s) Jason Fowlkes, Robert Winkler, Eva Mutunga, Juergen Sattelkow, Philip Rack, Harald Plank
On-Site Speaker (Planned) Jason Fowlkes
Abstract Scope Methods to 3D print materials at the nanoscale are few. This has limited the fabrication of nanoscale materials to mostly in–plane features and elements. This is especially true for nanomaterials synthesized using conventional nanoelectronic fabrication techniques where layer–by–layer fabrication is paramount. Focused electron beam induced deposition (FEBID) is a promising 3D nanoprinting method which, until recently, was limited to a trial and error approach rendering the method ill–suited for the reliable, on–demand printing of complex geometries. An integrated capability of experimental calibration, computer–aided design and simulation will be presented that solves this problem, at least for the case of complex 3D mesh style objects. Further, the integrated capability was used to determine the cause of a common 3D geometric distortion observed for relatively tall deposits. Beam–induced heating was revealed as the distortion mechanism leading to the development of a model–based compensation solution.
Proceedings Inclusion? Definite: At-meeting proceedings


3D Nanoprinting: An Integrated Approach of Experiments, Computer-aided Design and Simulations
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