While titanium has long been used as a structural material, the 21<SUP>st</SUP> century will see increasing demand for advanced titanium alloys to meet technological challenges for applications in the aerospace, biomedical, and energy fields, among many others. Variation of alloying elements and processing conditions of titanium alloys can be used to tailor the microstructures and hence properties such as strength, fracture toughness, creep resistance, corrosion resistance, and biocompatibility. This paper discusses recent findings regarding the effect of processing on microstructure and low-temperature (<0.25*T<SUB>m</SUB>) creep behavior of single-phase and two-phase titanium alloys. In particular, the role of alloy chemistry, interstitial impurities, and phase morphology will be considered. These findings are useful to predict the creep behavior of presently used titanium alloys and to develop new processing techniques for advanced titanium alloys with enhanced creep resistance.