The high-entropy nitride coatings comprised of various constituents Al, Cr, Si, Ti was deposited on Si substrate by Radio Frequency magnetron sputtering process. The Al-Cr-Si-Ti multi-component target introduced in this study was fabricated by vacuum arc melting. Different coatings were fabricated with different composition of target designed by Taguchi method. The hardness of AlCrSiTi nitride films with different composition was investigated and then analyzed by factor effects. The result showed that with increasing content of Al as well as Si, the hardness of the nitride film decreased, whereas as the Ti element decreased, the hardness of the nitride film did not change significantly. We got the best integrate property optimized film H with a hardness of 32 GPa. This research demonstrates that the (AlCrSiTi)100 – XNX nitride films have a potential for application of the protective hard coating on cutting tools.