High entropy alloys (HEAs) exhibit generally single solid solution with randomly distributed multi-principal elements in simple crystal structure. Because of unique microstructure and related novel properties, HEAs are attracting tremendous interest in the metallic materials community. In the present study, the design strategy of HEAs is applied into developing novel high-entropy intermetallic compound. Transition metal mono-silicides (TMMS) with B20 structure are one of the famous intermetallic compounds in which 3d transition metal and Si crystallize in cubic space group P213. Considering thermodynamic factors for phase stability, (Cr,Mn,Fe,Co,Ni)-Si transition metal high-entropy silicides (TMHS) with B20 structure are successfully developed. The transition metals (Cr,Mn,Fe,Co,Ni) in TMHS are randomly distributed in metal sub-lattice of B20 structure. To clarify the phase stability of these B20 structures, thermal analysis were performed in various temperatures and different compositions. The understanding built-up from this study offers a promising guideline for developing various novel high-entropy alloys.