|About this Abstract
||2017 TMS Annual Meeting & Exhibition
||Recent Developments in Biological, Structural and Functional Thin Films and Coatings
||Nanoscale Structure-property Relationship Studies of Metallic and Oxide Thin Films Using Correlative Electron Microscopy and Atom Probe Tomography
||Arun Devaraj, Steven Spurgeon, Rama Sesha Vemuri, Richard Oleksak, Greg Herman, Scott Chambers, Charles Henager, Aashish Rohatgi, Thevuthasan Suntharampillai
|On-Site Speaker (Planned)
Metallic and oxide thin films are used for a variety of structural and functional applications. The microstructure of such thin films directly determine the properties and hence influence the ultimate performance during use. The structural or compositional heterogeneity of such thin films are often in the nano-dimensions making it extremely challenging to quantify accurately by using conventional large spot size analytical methods. Advanced high spatial resolution methods like correlative electron microscopy and atom probe tomography are uniquely powerful in analyzing compositional and structural heterogeneity in thin films of metals and oxides, aiding in obtaining new insights on structure-property relationships. In this talk, examples for such detailed structure-property relationship studies from metallic thin film systems including Al alloy thin films, Ta-Ni-Si amorphous thin films, Ti/Al multilayer thin films and epitaxial double perovskite La2MnNiO6 oxide thin film will be presented.
||Planned: Supplemental Proceedings volume