|About this Abstract
||2017 TMS Annual Meeting & Exhibition
||Characterization of Minerals, Metals, and Materials
||Texture Patterns in Orientation Gradient Ta Thin Films
||Elizabeth Ellis, Markus Chmielus, Marissa Linne, Shefford P. Baker
|On-Site Speaker (Planned)
Since the discovery of the metastable beta phase of tantalum in 1965, much effort has focused on the parameters required to deposit a Ta film a particular phase. However, comparatively little work has been done on the transformation from the beta phase to the stable alpha phase. We have shown that Ta films deposited in the beta phase and transformed to the alpha phase show an unusual microstructure featuring long-range orientation gradients. Furthermore, EBSD reveals that variations in the initial film structure created by depositing under different sputter pressures have dramatic effects on the magnitude of the resulting orientation gradients and associated texture patterns. Pole figure analysis reveals many interesting features of these patterns, including the fact that seemingly unrelated film areas separated by large distances are actually parts of the same structure. We analyze these patterns to suggest a nucleation and growth sequence by which they might form.
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