|About this Abstract
||Materials Science & Technology 2011
||MS&T'11 Poster Session
||048 Improving PZT Thin Film Texture through Pt Metallization and Seed Layers
||Luz Miriam Sanchez, Daniel Potrepka, Glen Fox, Ichiro Takeuchi, Ronald G. Polcawich
|On-Site Speaker (Planned)
||Luz Miriam Sanchez
A study was performed between Ti/Pt and TiOx/Pt bottom electrodes to achieve a high degree of (001) texture and improve piezoelectric properties. The results indicate the use of a highly oriented TiOx led to highly textured (111) Pt which improved both the PbTiO3 (PT) seed layer and PZT orientations. PZT (52/48) and (45/55) thin films with and without PT were examined via x-ray diffraction methods (XRD). The PT provides improvement in the (001) orientation while suppressing the (111) orientation of the PZT. A 30% increase in deflection has been demonstrated and attributed to an increase in texturing in samples where the lotgering factor (f) has been assumed to vary from ~0.87 to ~0.96 based on earlier x-ray diffraction measurements. The dielectric constant values track accordingly varying from 863 (f=0.66) to 1010 (f=0.87) to 1343 (f=0.95) while the ferroelectric data exhibits only minor changes as a function of the (001) texture.