About this Abstract |
Meeting |
2023 TMS Annual Meeting & Exhibition
|
Symposium
|
Deformation Mechanisms, Microstructure Evolution, and Mechanical Properties of Nanoscale Materials
|
Presentation Title |
Challenges in Cross Sectional Nanoindentation of Multilayers in Modern Electronics |
Author(s) |
Stanislav Zak, Megan J. Cordill |
On-Site Speaker (Planned) |
Stanislav Zak |
Abstract Scope |
Nanoindentation is a great tool for assessment of materials hardness and elastic modulus in a high-throughput and controllable manner. It becomes a necessary tool when the material properties of thin films and micro- to nano-level structures are in question. However, multi layered functional materials commonly used in microelectronics are not physically accessible, hence, cross sectional characterization has to be used. However, due to large differences in stiffnesses between the used materials in a stack (metals – ceramics – polymers), the cross sectional nanoindentation may be influenced by the lateral deformation of the surrounding, different materials. Effectively leading to sensing not only the measured material, but the whole stack, creating erroneous results. Presented work shows nanoindentation results of thin layers close to different interfaces with emphasis on use of different indenter tips and indentation depths, in combination with numerical modelling to quantify the stress-strain fields within the sample. |
Proceedings Inclusion? |
Planned: |
Keywords |
Thin Films and Interfaces, Mechanical Properties, Modeling and Simulation |