About this Abstract |
Meeting |
MS&T22: Materials Science & Technology
|
Symposium
|
Advances in Emerging Electronic Nanomaterials: Synthesis, Enhanced Properties, Integration, and Applications
|
Presentation Title |
Microelectronics Application of Vapor-phase infiltration – Atomic Layer Deposition Derived Organic-Inorganic Hybridization Technique |
Author(s) |
Chang-Yong Nam |
On-Site Speaker (Planned) |
Chang-Yong Nam |
Abstract Scope |
Vapor-phase infiltration (VPI) is an organic-inorganic hybridization technique derived from atomic layer deposition (ALD), leveraging the sorption of gaseous materials precursors in organic matrix. While performed cyclically like ALD, the reaction of materials precursors occurs within the free volume of organic matrix rather than on the surface, creating hybrids with unique materials properties. In this talk, I will showcase a few examples of VPI applications in advanced microelectronics, including enhancing the sensitivity and etch resistance of hybrid extreme ultraviolet (EUV) photoresists and reducing the stochastic resistive switching in hybrid memristors. |