|About this Abstract
||2016 TMS Annual Meeting & Exhibition
||2016 Functional Nanomaterials: Emerging Nanomaterials and Techniques for 3D Architectures
||V-3: Laser-Assisted Purification of Electron-Beam-Induced Deposits
||Michael G Stanford, Brett B Lewis, Joo Hyon Noh, Jason D Fowlkes, Philip D Rack
|On-Site Speaker (Planned)
||Michael G Stanford
Electron beam induced deposition (EBID) is a direct-write process which can be used to selectively deposit material with nanoscale resolution which enables 3-dimensional deposition. EBID utilizes a scanning focused electron beam to dissociate adsorbed precursor molecules which subsequently condense onto the substrate. One of the major limitations of the EBID process is low material purity. Therefore, the development of EBID purification strategies for enhanced materials functionality is a grand challenge for wider application of this synthesis technique.
We have developed gas-assisted laser anneal processes to enhance the purity of EBID nanostructures deposited using MeCpPtIVMe3 precursor. Additionally, we have developed laser assisted electron-beam-induced-deposition (LAEBID) processes as an effective method to provide in-situ purification during deposition. The addition of a reactive gas and a synchronized electron and laser pulse begins to look a lot like a nanoscale atomic layer deposition process (ALD), however the half reactions are electron and thermally stimulated.