|About this Abstract
||2016 TMS Annual Meeting & Exhibition
||2016 Functional Nanomaterials: Emerging Nanomaterials and Techniques for 3D Architectures
||Nano-manufacturing Process Using Electro-fountain Pen Nanolithography
||Ben Luce, Indranath Dutta
|On-Site Speaker (Planned)
A tip-based nanolithography apparatus resembling a fountain pen was devised to write electrically conductive circuits onto semiconductor substrates using low melting-point metals. Liquid electromigration was used as the driving force to continuously flow liquid metal down a Cu coated Si stylus onto the substrate in a controlled manner. A LabVIEW program was created to operate the piezoelectric nano-positioning stage and its movement relative to the stylus while actively monitoring the writing conditions and controlling the flow of metal. This unique manufacturing technique can be used in future electronic applications such as flexible electronics or to create multi-layered, conductive patterns. The effect of surface roughness on liquid electromigration was also studied and the transition from continuous to discontinuous flow was modelled using Cassie and Wenzel wetting conditions. The findings were used to optimize processing conditions within the nanolithography tool.