Metal thin films were sputter deposited onto Si substrates followed by deposition of a thick CrN layer. Cylindrical micro-pillars were fabricated from CrN/Metal/Si specimens, in which the interfaces were at various inclinations to the pillar axial direction.
Axial compression was conducted on CrN/Cu/Si micro-pillars. Load-displacement curves were measured and, together with morphological observations, showed extensive plasticity within the Cu interlayers confined between Si and CrN. Measured flow stresses exhibited significant mechanical size effects. Detailed structural characterizations of the sputter deposited thin films were carried out. A simple strain gradient plasticity model was applied to the experimental configuration and compared to the data. Additional results will be discussed.
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2. Y. Mu, K. Chen, W. J. Meng, MRS Comm. 4, 129-133 (2014).
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