The occurance of head and neck cancer ranks the fifth common cancer worldwide. Anti-cancer treatment like chemotherapy and radiotherapy are usually done; however, the therapies may cause damage to not only cancer cells but also surrounding cells. Recent studies show that non-thermal atmospheric plasma, a physical method, is competent to heal wounds, kill unexpected bacteria, coagulate blood, and inactivate cancer cells. Plasma is a partially ionized gas containing energy particles including electrons, ions, and neutral atoms. The working temperature can be adjusted lower than 40oC. In this study, a novel N2/He micro-plasma device is evaluated to inactivate a tumor cell, pharynx squamous carcinomatous cell (FaDu) and benign cell (Hs 840.T). Our initial result shows that the percentage of viable FaDu cells decreased with N2/He micro-plasma exposure time, while the morphology of the treated FaDu cells became round after treatment. Potentially, N2/He micro-plasma treatment is a promising method for cancer therapy.