There is an increasing demand for alternative and renewable energy sources as well as more efficient use of energy. Oxide ceramic thin films offer a unique potential for applications in solid oxide fuel cells (SOFC), coated conductors and miscellaneous alternative energy devices. Among the chemical deposition techniques for such oxides, chemical solution deposition (CSD) features high flexibility with regard to composition, materials, and substrates while maintaining cost efficiency. After reviewing the established aspects of CSD for ceramic films, the focus will be laid on CSD of films for proton conducting SOFCs, coated conductors and other relevant systems. Attention is given to precursors, solution chemistry, and process development with view on the structural evolution of the precursor solution into the crystalline state and the impact of precursor chemistry and film fabrication conditions on the transformation process. A novel approach based on dispersions of microemulsion derived nanoparticles complements the traditional precursor methods.