|About this Abstract
||2017 TMS Annual Meeting & Exhibition
||Deformation and Transitions at Interfaces
||L-47: Deformation Mechanisms in Ti/TiN Multi-layered Thin Films
||Tarang Mungole, Bilal Mansoor, Georges Ayoub, David P. Field
|On-Site Speaker (Planned)
Deformation behavior of metal-ceramic multi-layered systems is not fully understood. Metal-ceramic multi-layered thin film systems comprising of alternating layers of Ti and TiN were fabricated using a physical vapor deposition technique on a (100) type Si wafer. Samples with different period thicknesses of Λ = 20 nm, Λ = 10 nm and Λ = 5 nm were produced. Films of pure Ti and pure TiN were fabricated as reference samples. Nano-indentation revealed that hardness for Λ = 20 nm sample was higher than predicted by the rule-of-mixtures, while Λ = 10 nm and Λ = 5 nm samples were in its agreement. Atomic force microscopy revealed grain boundary sliding of ~ 2 nm in ~ 30 nm sized grains in pure Ti sample after micro-indentation. Details of the deformation mechanisms at the interfaces of the multi-layered systems assessed by microscopic observations will also be presented.