Abstract Scope |
In this talk, I will discuss advances in the in situ monitoring of ALD film growth over complex, 3D nano-architectures using synchrotron XANES spectroscopy. Leveraging the high photon flux of the ISS beamline at NSLS II and a dedicated, fully integrated ALD reactor, XANES data can be collected continuously during the ALD process, supplying a sequence of data probing the growth process in all stages. Specifically, the structural evolution of ALD titania is studied in situ as it accumulates under growth conditions similar to optimized lab conditions. A unified set of analysis tools are developed to interpret the time-series of spectral data and to establish growth stages based on distinguishable spectral features. MCR-ALS analysis, physically constrained, demonstrates two specific spectral components, corresponding to titania surface and bulk, with associated, time-dependent concentrations. Finally, transient spectral signatures for the intra-cycle growth kinetics are reconstructed at a time resolution of about 1s. |