|About this Abstract
||2016 TMS Annual Meeting & Exhibition
||CFD Modeling and Simulation in Materials Processing
||G-7: A Simulation Study on the Spreading and Heat Transfer during Fabrication of Ruthenium Target by Spark Plasma Sintering (SPS)
||Hyo Eun Nam, Jun-Ho Jang, Hyun-Kuk Park, Ik-Hyun Oh
|On-Site Speaker (Planned)
||Hyo Eun Nam
Spark Plasma Sintering (SPS) has been extensively developed to fabricate the sputtering target which has very short processing time to complete a sintering process compared to conventional sintering such as HP or HIP. SPS process is allowed to fabricate nano-structured materials, which shows more densification and fewer defects in sintered body. However, despite such advantages of SPS process, computational access should be considered such as joule heat, pressure, voltage, and pulse current.
In this study, Ruthenium target used in memory devices is systematically simulated on heat transfer whether the density of Ru target is influenced by the temperature distribution in SPS process. Small difference in temperature between center and edge of mold is observed at 1200℃ by simulation. Consequently, Ru target sintered at 1200℃ showed the highest relative density of 99.1% compared to other experimental conditions of simulation results. The detailed simulation results will be discussed in the presentation.
||Planned: A print-only volume