About this Abstract |
Meeting |
2022 TMS Annual Meeting & Exhibition
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Symposium
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Mechanical Response of Materials Investigated Through Novel In-Situ Experiments and Modeling
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Presentation Title |
Tensile and FatigueTesting of Metallic Thin Films with Ultra-thin Passivation Layers |
Author(s) |
Sunkun Choi, Ho Jang Kim, Yu Hyun Park, Gi-Dong Sim |
On-Site Speaker (Planned) |
Sunkun Choi |
Abstract Scope |
For the design of reliable micro/nano-scale devices, it is essential to know the size-dependent properties of materials. Accordingly, researchers tried to investigate the intrinsic properties of thin films. However, in real applications, there are only few cases where films are placed as freestanding. Therefore, it is crucial to understand the performance of thin films with and without a passivation layer. In this work, we report on the changes in mechanical behavior of sub-micron metallic films by deposition of ultra-thin (< 10nm) passivation layers. A custom-built apparatus and specimens fabricated through MEMS process were utilized to perform micro-tensile tests. Passivation effect was observed under monotonic and cyclic loading, and investigated how it affects the bahavior of metal films with and without annealing. Stress-strain curves show an increase in elongation for passivated metal films, which is attributed to delay in the strain localization due to constraint imposed by the ultra-thin passivation layer. |
Proceedings Inclusion? |
Planned: |
Keywords |
Mechanical Properties, Thin Films and Interfaces, |