Abstract Scope |
Silicon and LTCC tapes (Low Temperature Cofired Ceramics) are standard substrate materials in micro sensors and microsystems technology. Established methods of micro-technology, such as photolithography and micro-structuring, thick-film and thin-film technologies, as well as methods of assembly and connection technologies can be applied to both materials, resulting in efficient microsystems fabrication options for various product areas. Through combination of both materials into a common SICER substrate system, micro systems with significantly higher complexity might be developed.
The presentation will deal with the development of the slurry and the casting technique of the LTCC tape for the SICER process. There is an in depth look at the goals and benefits of the technology and the processing steps. In order to qualify the composition of the slurry and the green sheets, viscosity measurements, SEM pictures, tensile tests, lamination tests and the determination of other green tape properties were carried out. |